- Analytical UHR Schottky Emission Scanning Electron Microscope SU-70
Analytical FE-SEM combines the field-proven stability, high current, and brightness with ultra-high resolution required for a multitude of analytical applications. The Duo-objective Lens designed with a semi-in-lens optics provides capabilities for a wide range of applications that require high-resolution image observation and analysis. The SU-70 offers a industry-leading technology, quality, and reliability.
Overview
The Hitachi SU-70 Analytical Field Emission SEM combines the field proven stability, high current and brightness of the Schottky electron source with the ultra-high resolution required in a multitude of analytical applications. Designed with a semi-in-lens optical configuration, Hitachi's patented ExB technology provides a unique electron signal filtering and mixing system suited for today's demanding applications for research and development and multidiscipline studies.
This instruction manual describes the operation, maintenance, and specific precautions pertinent to daily operation on the model S-4800 scanning electron microscope. First, read and get familiar with the safety precautions described in the opening pages and General Safety Guidelines. Hitachi History The history of the Hitachi Group, from its founding in 1910 to today Sustainability Hitachi’s approach to addressing the social and environmental issues Hitachi Social Innovation Strive to provide total solutions for sustainable, urban development worldwide and to address critical global issues.
The large specimen stage and analytical chamber accommodate a wide variety of analytical instrumentation such as EDS*, WDS*, EBSP*, CL*, STEM*, and e-Beam Lithography* techniques optimized for simultaneous analysis.
The SU-70 Analytical FESEM continues the tradition of providing industry leading technology coupled with the quality and reliability recognized throughout the industry in Hitachi products and services.
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Features
Ultra High Resolution Imaging; 1 nm/15 kV, 1.6 nm/1 kV (with Beam Deceleration Moda)*
Ultra high resolution performance made possible with Hitachi's patented semi-in-lens optical design and electron gun technology.
In-lens SE and BSE Signal Filtering and Mixing Mode
Enables SE and BSE signal collection and control to eliminate or reduce specimen charging and enhance compositional contrast information.
Sub Nanometer Level Surface Observation at Ultra Low Accelerating Voltages
Provides high resolution, sub nanometer level surface observation at ultra-low accelerating voltages down to 100 V by utilizing the electron beam deceleration function.
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Maximum Probe Current of 100 nA or Greater Available with the Field Proven Schottky Electron Source
High current and high resolution conditions are optimized for analytical techniques such as EDS*, WDS*, EBSP*, CL*, and e-Beam lithography* for increased productivity and throughput.
EBSP Analysis In Field Free (FF) Mode
Hitachi's unique FF mode eliminates the projected magnetic field of the objective lens associated with semi-in-lens technology, and thereby eliminates artifacts during analysis of magnetic samples and with EBSP* applications.
Large Analytical Specimen Chamber
Designed to optimize the simultaneous analysis of a wide variety of analytical techniques such as EDS*, WDS*, EBSP*, CL* and e-Beam Lithography* by optimizing the analytical detector solid angle and maintaining high resolution.
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Application Data
Life Sciences
Protein on Metal Substrate
Specimen Courtesy of OLYMPUS Corporation.
Dark contrast shows protein distribution on substrate.
BSE and SE signal mixed image acquired at 1 kV.
BSE and SE signal mixed image acquired at 1 kV.
Materials Science
![Hitachi Su-70 Sem User Manual Hitachi Su-70 Sem User Manual](/uploads/1/2/6/0/126067708/843820909.jpeg)
Ni alloy (Inconel)
Elemental analysis of precipitate.
High probe current application -WDS analysis-
High probe current application -WDS analysis-
HV=10 kV
WDS map shows Molybdenum distribution in precipitates.
High probe current of SU-70’s electron optics supports WDS analysis.
High probe current of SU-70’s electron optics supports WDS analysis.
Hitachi Cd Sem Manual
DP steel phase analysis, EBSD+EDS simultaneous acquisition
Semiconductors
-wide gap semiconductor - crystal defect examination by using cathode luminescence
![Hitachi Su-70 Sem User Manual Hitachi Su-70 Sem User Manual](/uploads/1/2/6/0/126067708/213219588.jpg)
Cd Sem Hitachi
Pan-chromatic CL image
Mono-CL images
Specimen : AlGaN / GaN
HV : 2 kV
HV : 2 kV
RGB overlaid image
R : 345 nm
G : 328 nm
B : 310 nm
R : 345 nm
G : 328 nm
B : 310 nm
STEM images of SRAM cross section
New coherent cold field emission source
Information on our new cold field emitter technology can be found here.
Technical magazine
'SI NEWS'
This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.
nanoart
Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.
Science & Medical Systems
- Electron Microscopes / Atomic Force Microscopes
- Electron Microscopes (SEM/TEM/STEM)
Related Links
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